Atmospheric pressure chemical vapour deposition of thin films of Nb2O5 on glass

Journal of Materials Chemistry Pub Date: 2003-10-15 DOI: 10.1039/B307768N

Abstract

A novel route involving atmospheric pressure chemical vapour deposition (APCVD) is reported for coating Nb2O5 onto glass substrates via the reaction of NbCl5 and ethyl acetate at 400–660 °C. Raman spectroscopy is shown to be a simple diagnostic tool for the analysis of these thin films. The contact angle of water on Nb2O5-coated glass drops on UV irradiation from 60° to 5–20°. XPS Analysis showed that the Nb∶O ratio of the film was 1∶2.5. Glancing angle X-ray diffraction showed that all films were crystalline, with only a single phase being observed; this has some preferred orientation in the (201) plane of Nb2O5. The niobium(V) oxide materials show minimal photocatalytic ability to degrade organic material.

Graphical abstract: Atmospheric pressure chemical vapour deposition of thin films of Nb2O5 on glass
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